Method of making a semiconductor device with buried electrode

ABSTRACT

A semiconductor device including a bipolar transistor, has a collector region including a first semiconductor region of the first conductivity type and a second semiconductor region of the first conductivity type having higher resistance than the first semiconductor region, a base region including a semiconductor region of the second conductivity type, and an emitter region including a semiconductor region of the first conductivity type. The semiconductor device further comprises a metal layer region for connecting the first semiconductor region and the collector electrode on the collector region provided within the second semiconductor region layer of the collector region.

This application is a division of application Ser. No. 07/823.604, filedJan. 17, 1992, now U.S. Pat. No. 5,306,934, which is a continuation ofapplication Ser. No. 07/708,217 filed May 31, 1991 now abandoned.

BACKGROUND OF THE INVENTION

Field of the Invention

This invention relates to a semiconductor integrated circuit device suchas a memory, a photoelectric converting device, a signal processingdevice, etc. Such a device is with various electronic instruments,particularly with a semiconductor device having a specific feature inits electrode structure and a method for preparing the same.

Related Background Art

To describe the prior art, as an example, a vertical PNP (hereinafterabbreviated as V-PNP) transistor which has been used in recent years asa functional device for highly integrated semiconductor device may bementioned, such as one having the structure shown in FIG. 1. In FIG. 1,the reference numeral 1 is a P-type silicon substrate. On the P-typesilicon substrate 1 is formed an N⁺ buried layer 2, and on the N⁺ buriedlayer 2 is formed a collector region 5 comprising a P⁺ buried layer 3and a P⁻ well layer 4. Within the P⁻ well layer 4 of the collectorregion 5 is formed an N⁻ well layer 6, and further within the N⁻ welllayer 6 are formed a P⁺ layer 7 and an N⁺ layer 8 made apart from eachother. Within the P⁻ well layer 4 of the collector region 5 is formed aP⁺ layer 9 apart from the N⁻ well layer 6. And, on the P⁺ layer 7, theN⁺ layer 8 within the N⁻ well layer 6 and the P⁺ layer 9 within the P⁻well layer 4 are respectively formed an emitter electrode 10, a baseelectrode 11 and a collector electrode 12.

Around the collector region 5 as mentioned above, an N⁻ epitaxial layer13 is formed.

In the V-PNP transistor with such a structure, when the transistoractuation enters a saturation region (stage), leakage current may appearfrom the collector region 5 through the N-epitaxial layer 13 into theP-type silicon substrate 1, thereby forming a parasitic PNP transistor.For this reason, as shown in FIG. 2, there has been also known atransistor which has been made to have a constitution having a deep N⁺layer 14 in contact with the N⁺ layer 2 and surrounding the collectorregion 5 formed within the N⁻ epitaxial layer 13, and further in whichthe emitter grounding current amplification β of the parasitic PNPtransistor is reduced by biasing to the maximum potential. Thus, theleakage current to the P-type silicon substrate 1 can be reduced. Theguard ring electrode 15 of the transistor is taken out from the N⁺buried layer 2 through the N⁺ layer 14.

However, in the transistor of the type shown in FIG. 1 and FIG. 2, thecurrent from the emitter electrode 10 flows into the P⁻ well layer ofthe collector region 5 and the P⁺ buried layer 3, wherefrom it is takenout through the P⁺ layer 9 on the transistor surface at the collectorelectrode 12, and therefore the resistance of the P⁻ well layer 4becomes larger. Thus involving the drawback that the collector seriesresistance becomes larger as a whole. Further, when the collector seriesresistance becomes larger, the emitter grounding current amplification βof a large current region becomes lower. While when the collector region5 is larger, there will occur an inconvenience that the device sizebecomes larger.

In the transistor shown in FIG. 2, because the N⁺ layer 14 is requiredto be provided within the N⁻ (epitaxial) layer 13 around the collectorregion 5, the margins of the collector region 5 and the deviceseparation region 16 are required to be sufficiently large due to theinfluence of the lateral spreading of the diffusion layer, and thereforethe device size also becomes larger in such a case. However, thejunction capacity with the N⁺ layer 14 of the collector region 5 will beincreased.

The technical task as described above is marked in the V-PNP transistor,and also in other functional devices, there is main electrode region(buried collector, buried base, buried emitter, buried source, burieddrain, buried gate, etc.) within semiconductor substrate, and it isapplicable similarly if a region for connecting electrically saidelectrode region to the electrode wiring on the substrate surface isrequired.

SUMMARY OF THE INVENTION

A primary object of the present invention is to provide a semiconductordevice having improved characteristics as compared to than in the priorart.

More specifically, the present invention has been accomplished in orderto solve the technical task as described above, and its object is toprovide a semiconductor device capable of great current actuation.

Another object of the present invention is to provide a semiconductordevice including a bipolar transistor, having a collector regionincluding a first semiconductor region of the first conductivity typeand a second semiconductor region of the first conductivity type havinghigher resistance than said first semiconductor region, a base regionincluding a semiconductor region of the second conductivity type, and anemitter region including a semiconductor region of the firstconductivity type, said device comprising a metal layer region forconnecting said first semiconductor region and the collector electrodeon said collector region provided within said second semiconductorregion layer of said collector region.

BRIEF DESCRIPTION, OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view showing an example of thebipolar transistor of the prior art.

FIG. 2 is a schematic cross-sectional view showing another example ofthe bipolar transistor of the prior art.

FIG. 3 is a schematic cross-sectional view showing the first embodimentof the present invention.

FIGS. 4A to 4I are schematic cross-sectional views for illustration ofthe preparation method of the semiconductor device according to thepresent invention.

FIG. 5 is a schematic cross-sectional view showing the second embodimentof the present invention.

FIG. 6 is a schematic cross-sectional view showing the third embodimentof the present invention.

FIGS. 7A to 7E are schematic views for illustration of the semiconductordevice according to the third embodiment of the present invention.

FIG. 8 is a schematic view for illustration of the CVD apparatus to beused for preparation of the semiconductor device according to thepresent invention.

FIGS. 9, 10 are schematic views showing one example of the film formingapparatus to be used for practicing the preferable film forming methodof the wiring layer in the semiconductor device according to the presentinvention.

FIG. 11 is a schematic plan constitutional view of the apparatus shownin FIGS. 9 and 10.

FIG. 12 is a schematic constitutional view of the movement order of thesubstrate in FIG. 11 added with arrowheads.

FIGS. 13A to 13D are schematic views for illustration of the preferablefilm forming method for formation of the wiring layer in thesemiconductor device according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

In the following, preferred embodiments of the present invention aredescribed.

An electrode structure to be used in a preferred embodiment of thepresent invention is an electrode region comprising a metal region withan aspect ratio buried within the semiconductor substrate.

The electrode structure of the present invention forms a part of theelectrode wiring internally of the semiconductor substrate in the senseof series resistance reduction, and can be utilized for all functionaldevices, namely functional devices such as a field effect transistor, abipolar transistor, a diffusion resistance, etc. Particularly, greateffects will be exhibited when it is utilized for the collectorelectrode of a bipolar transistor, above a V-PNP transistor.

(First embodiment)

FIG. 3 is a schematic cross-sectional view showing a V-PNP transistor asits example. In FIG. 3, the same symbols are attached to the sameconstitutional portions as in the V-PNP transistor of the prior artshown in FIGS. 1 and 2, and description thereof is omitted.

In FIG. 3, the symbol 20 is a first electrode region comprising a metalas the electroconductive material. Here, W<H, with H/W being 1.0 orhigher, preferably 2.0 or higher, optimally 3.0 or higher, whereby thearea occupied by the collector electrode can be made smaller. The firstelectrode region 20 connects the P⁺ buried layer 3 in the collectorregion 5 to the collector electrode 12, and is formed here along thedirection crossed at right angle as the crosslinking direction relativeto the surface of the P-type silicon substrate 1 within the P⁻ welllayer 4 of the collector region 5 between the P⁺ buried layer 3, thecollector electrode 12 and the interlayer insulation film 18. The P⁻well layer 4 has a higher resistance than the P⁺ buried layer. In thepresent embodiment, because the first wiring layer is indirect ohmiccontact with the P⁺ buried layer 3, no impurity layer corresponding tothe P⁺ layer 9 in the transistor of the prior art shown in FIGS. 1 and 2is formed.

As the electroconductive material for forming such first electroderegion 20, materials conventionally employed for electrodes or wiring inelectronic devices or integrated circuit devices may be employed, suchas semiconductors, and among them pure aluminum or an aluminum composedmainly of Al and containing silicon as a metal (Al-Si). Particularly, Alis preferred since it is inexpensive, has high electroconductivity, andalso can form a dense oxidized film on the surface Al has a number ofadvantages such that the inner portion is chemically protected to bestabilized and has good adhesion with Si, and therefore it can bepreferably used when connecting well the P⁺ buried layer 3 to, forexample, a collector electrode 12 comprising Al.

Thus, when the metal buried electrode is electrically connected to apredetermined portion only at the bottom of the groove, the whole sidewall surface should be preferably covered with an insulation film.

On the other hand, when the metal buried electrode is insulated from apart of the side wall or the bottom of the groove, only said portion iscovered with an insulation film.

Next, by referring to FIG. 4A to FIG. 4I, an example of the presentinvention is described.

1) First, for example, on the surface of a P-type silicon substrate 1having an impurity concentration of 10¹⁴ to 10¹⁵ /cm³, a thermallyoxidized film 30 comprising SiO₂ for diffusion mask, etc. is formed witha thickness of, for example, 0.8 to 1.0 mm, and then by patterning ofthe thermally oxidized film 30 and openings 31 with predetermined sizes,shapes are formed. Next, with the thermally oxidized film 30 as themask, an N-type impurity such as Sb (antimony) or As (arsenic) isintroduced according to the ion injection method in the surface of theP-type silicon substrate 1 through the openings 31 of the thermallyoxidized film 30, heat treatment is carried out to activate the N-typeimpurity simultaneously with diffusion thereof internally of the P-typesilicon substrate 1. Thus, for example, an N⁺ buried layer 2 with asheet resistance 40 to 120 Ω/∛ is formed (FIG. 4A).

2) Next, after removal of the thermally oxidized film 30 as describedabove, a thermally oxidized film 32 comprising another SiO₂, etc. isformed with a thickness of, for example, 100 to 1000 Å. Resistpatterning is effected on the thermally oxidized film 32. Afterincorporation of a P-type impurity of B (boron) into the N⁺ buried layer2 and the region surrounding outside of the N⁺ buried layer B throughthe openings of the resist, heat treatment is applied after removal ofthe resist. By such heat treatment, the impurity as described above isactivated simultaneously with diffusion internally of the substrate 1.Thus, P⁺ layers 33, 34 of, for example, 200 to 1000 Ω/∛ are formed (FIG.4B).

3) Next, after removal of all the oxidized films on the siliconsubstrate 1, an N-type epitaxial layer 13 is grown. The N-type epitaxiallayer 13 should desirably have its thickness of about 1 to 5 μm, and aspecific resistance of about 1 to 20 Ω/cm. In such epitaxial growth, theimpurity is diffused into the N-type epitaxial layer 13 from the P⁺layers 33, 34. Particularly, from the N⁺ buried layer 2 (P⁺ layer 33),the N-type and P-type impurities are diffused into the N-type epitaxiallayer 13. However, since the P-type impurity with greater coefficient ofdiffusion is diffused at a higher diffusion speed, a P⁺ buried layer 3will be formed on the N⁺ buried layer 2 (FIG. 4C).

4) Next, a thermally oxidized film is formed on the surface of theN-type epitaxial layer as described above, the thermally oxidized filmis subjected to patterning to form openings. After introduction of aP-type impurity such as B into the surface of the N-type epitaxial layer13 according to ion injection through the openings with the thermallyoxidized film as the mask, heat treatment is effected to have theimpurity diffused internally of the N-type epitaxial layer 13. By suchion injection method and heat treatment, a P⁻ well layer 4 is formed onthe P⁺ buried layer 3 (FIG. 4D). The well layer 4 should desirably havea sheet resistance of about 2 to 10 kΩ/∛.

5) Next, after removal of the thermally oxidized film from above theN-type epitaxial layer 13, a thermally oxidized film with a thickness of100 to 1000 Å and a non-oxidizable film comprising Si₃ N₄, etc. with athickness of 1000 to 2000 Å are successively laminated. Next, on thelaminated film, patterning is applied to form openings for deviceseparation region as described below. And, according to the selectiveoxidation by use of the laminated film as the oxidation resistant mask,a field oxidized film region 17 for device separation (thickness 0.8 to1.0 μm) and a device region for bipolar region are formed, and then thelaminate film as described above is removed (FIG. 4E).

6) Next, a thermally oxidized film with a thickness of 200 to 1000 Å isformed on the N⁺ type epitaxial layer 13 in the device region, thethermally oxidized film is applied with resist patterning to formopenings for base formation of the bipolar transistor. Then, afterintroduction of an N-type impurity through the openings, the thermallyoxidized film is removed and then heat treatment is effected. By doingso, a N⁻ well layer (base) 6 is formed within the P⁻ well layer 4. Theformation conditions of the base layer 6, which depend on thecharacteristics of the bipolar transistor to be prepared, shoulddesirably be made to have a sheet resistance of about 0.6 to 3 kΩ/∛.(FIG. 4F).

7) Next, on the surface of the device region, a thermally oxidized filmis formed, and the thermally oxidized film is applied with resistpatterning to form openings at the positions corresponding to the N⁻well layer (base) 6 of the thermally oxidized film, namely the emitterformation region of the resist and the PN device separation region.Next, after introduction of a P-type impurity such as B, BF₂ etc.through these openings, the thermally oxidized film as the resist isremoved.

Next, a thermally oxidized film is formed on the surface of the N⁻ welllayer (base) 6, the thermally oxidized film is applied with resistpatterning to form openings for formation of the N⁺ layer of the basecontact. Next, after formation of an N-type impurity such as As, etc.though the openings according to the ion injection method, a thermallyoxidized film as the resist is formed.

Then, the P-type impurity is activated and diffused by application ofheat. treatment to form the P⁺ layer 7 and the N⁺ layer 8 separatelyfrom each other at the upper portion of the N⁻ well layer (base) 6 (FIG.4G).

The ion injection conditions of the P-type impurity in this step andsubsequent heat treatment conditions are determined depending on thecharacteristics of the bipolar transistor to be prepared.

8) Next, on the whole surface of the device region and the deviceseparation, for example, BPSG (Boro-phospho silicate glass), etc. isdeposited to a thickness of about 0.6 to 1.0 μm according to the CVDmethod, annealing is applied to form an interlayer insulation film 18.

9) Next, a thermally oxidized film is formed on the interlayerinsulation film 18, and the thermally oxidized film is applied with aresist patterning to form openings for contact hole. Subsequently,through the openings the interlayer insulation film 18 and the P⁻ welllayer 4 are applied with etching in two steps to form collector contactholes reaching the surface of the P⁺ buried layer 3, and then thethermally oxidized film as the resist is removed. Then, a firstelectrode region 20 comprising an Al film or an Al-Si film is formedaccording to the Al-CVD method (FIG. 4H).

10) Next, on the surface of the device region is formed a thermallyoxidized film, which thermally oxidized film is applied with patterningto form resist openings for formation of contact holes for base andemitter. Next, through these openings, etching is applied on theinterlayer insulation film 18 to form base contact holes and emittercontact holes, respectively. Subsequently, within these base contactholes and emitter contact holes, electrode layers 21 and 22 comprisingan Al film or an Al-Si film are again formed so as to be coplanar withthe interlayer insulation film 18 according to the Al-CVD method.

Next, an Al film or Al-Si film is formed with a thickness of 0.5 to 1.0μm on the whole surface of the device region according of thenon-selective CVD method or sputtering method, and by application ofpatterning to the Al film, etc., the respective electrodes of emitterelectrode 10, base electrode 11, collector electrode 12 and the wiringsaccompanying these are formed to prepare the desired V-PNP (FIG. 4I).

As shown in FIG. 4H, the first electrode region 20 is grown so as to becoplanar with the interlayer insulation film 18 according to the Al-CVDmethod, but it is also possible to stop once the selective growth at thestage when the first wiring layer 20 has been grown to coplanar with theP⁺ well layer 4, and effect selective growth by initiating again theAl-CVD method after formation of the base and emitter contact holes asdescribed above, thereby making the respective upper surface of thefirst electrode region 20 and the electrode layers 21, 22 coplanar.

In a V-PNP transistor thus constituted, since the first electrode region20 is provided, the collector series resistance of the P⁻ well layer 4can be reduced to a great extent, and therefore reduction of the emittergrounding current amplitude β of the large current region, namely thepresent transistor can be ameliorated.

(Second Embodiment)

FIG. 5 is a schematic cross-sectional view showing another embodiment ofthe present invention. Also in FIG. 5, the same constituent portions asthose of the V-PNP transistor of the prior art showing. FIGS. 1, 2 areattached with the same reference numerals, and description thereof isomitted.

The present invention can be suitably used for the second wiring layercomprising an electroconductive material shown by the symbol 24 in FIG.5. The second electrode region 24 connects the guard ring electrode 15on the interlayer insulation film 17 to the N⁺ buried layer 2, and isformed along the direction crossing at right angle to the surface of theP-type silicon substrate 1 so as to extend through the N⁻ epitaxiallayer 13 surrounding the collector region 5 and the interlayerinsulation film 17.

As the electroconductive material forming the second electrode region24, the same kind as that forming the first electrode material region 20as described above can be used. And, when forming both of the electroderegions 20, 24, for example, after formation of necessary contact holesaccording to such steps as resist patterning, etching, etc., bothelectrode regions 20, 24 can be formed at the same time according to theAl-CVD method preferable for formation of the electrode regionsaccording to the present invention.

In a V-PNP transistor thus constituted, since the second electroderegion 24 is provided, even a parasitic PNP transistor may beconstituted at the saturation step as the transistor actuation, theemitter grounding current amplification β of the parasitic PNPtransistor can be reduced, and also the leak current to the P-typesilicon substrate 1 reduced by biasing to the maximum potential. And, inthe V-PNP transistor, as different from the structure of the V-PNPtransistor of the prior art shown in FIG. 1, the second electrode region24 is provided comprising Al, etc. instead of the deep N⁺ layer 14, andtherefore no diffusion of the dopant from the N⁺ layer 14 is required tobe considered. Hence, no great margin of the collector region 5 and thedevice separation region 16 is required to be taken, whereby the devicesize can be made smaller and also the junction capacity of the collectorregion 5 can be made smaller.

As described above, for formation of the first electrode region 20 orthe second electrode region 24, other methods, for example, thesputtering method, the gas phase method such as the CVD method, etc. byuse of triethylaluminum can be used, provided that such a deep hole canbe buried. However, particularly with respect to the point that Al,films of good quality, etc. can be formed in the case when the aspectratio (depth of hole/hole diameter) is relatively larger and the holediameter itself is smaller as the contact hole for wiring layer asdescribed above, the Al-CVD method as described below is preferred.According to the Al-CVD method, fine working can be suitably effectednot only for an aspect ratio of 1.0 or higher as a matter of course, butalso for 2.0 or higher, or 3.0 or higher.

Referring now to specific examples, the present invention is describedin detail.

[Experimental example 1]

In the following manner, a V-PVP transistor with the constitution shownin FIG. 3 was prepared.

First, on the surface of a P-type silicon substrate having an impurityconcentration of 10¹⁴ to 10¹⁵ /cm³ was formed a thermally oxidized filmcomprising SiO₂, etc. for diffusion mask with a thickness of 0.8 to 1.0μm, and the thermally oxidized film was subjected to patterning to formopenings with predetermined sizes, shapes on the thermally oxidizedfilm. Subsequently, after introduction of an N-type impurity such as Sb(antimony) or As (arsenic) into the P-type silicon substrate through theopenings 31 according to the ion injection method, heat treatment waseffected to activate the N-type impurity simultaneously with diffusioninternally of the P-type silicon substrate. Thus, an N⁺ buried layer of40 to 120 Ω/∛ was formed.

Next, after removal of the thermal fixed film as described, anotherthermal oxidized film comprising SiO₂, etc. was formed with a thicknessof about 100 to 10000 Å. On the thermally fixed film was applied aresist patterning. After introduction of a P-type impurity of B (boron)in the N⁺ buried layer and the region surrounding the outside of the N⁺buried layer through the openings of the resist, heat treatment wasapplied after removal of the resist. By such heat treatment, theabove-mentioned impurity was activated simultaneously with diffusioninternally of the silicon substrate. Thus, a P⁺ layer of 200 to 1000 Ω/∛was formed.

As the next step, all of the oxidized films on the silicon substratewere removed, and then an N-type epitaxial layer was grown. The N-typeepitaxial layer had a thickness of about 1 to 5 μm and a specificresistance of about 1 to 20 Ω/cm. By such epitaxial grown, a P⁺ -typeburied layer was formed on the N⁺ buried layer.

Next, on the surface of the N⁻ epitaxial layer, a thermally oxidizedfilm was formed, the thermally oxidized film was subjected to patterningto form openings, and after introduction of a P-type impurity such as B,etc. into the N⁻ epitaxial layer surface with the thermally oxidizedfilm as the mask through its openings according to the ion injectionmethod, heat treatment was effected to have the impurity diffusedinternally of the N⁻ epitaxial layer. By doing so, a P⁻ well layer wasformed on the P⁺ buried layer. The P⁻ well layer had a sheet resistanceof 2 to 10 kΩ/∛.

Next, after removal of the thermally oxidized film from above the N⁻epitaxial layer, again a thermally oxidized film with a thickness of 100to 10000 Å and a non-oxidizable film comprising Si₃ N₄, etc. with athickness of 1000 to 2000 Å were successively laminated. Then, thelaminated film was applied with patterning to form openings for deviceseparation region as described below. And, by the selective oxidation byuse of the laminated film as oxidation resistant mask, the fieldinsulation film region for device separation (thickness 0.8 to 1.0 μm)and the device region for bipolar transistor were formed, followed byremoval of the laminated film.

Subsequently, on the surface of the N⁻ epitaxial layer in the deviceregion, a thermally oxidized film with a thickness of 200 to 10000 Å wasagain formed, which thermally oxidized film was applied with resistpatterning to form openings for base formation of bipolar transistor.Then, after introduction of an N-type impurity through the openingsaccording to the ion injection method, the thermally oxidized film asthe resist was removed, following by heat treatment. By doing so, an Nwell layer (base) was formed within the P well layer. The base layer hada sheet resistance of about 0.6 to 3 kΩ/∛.

Next, on the surface of the device region a thermally oxidized film wasformed, and the thermally oxidized film was applied with resistpatterning to form openings at the positions corresponding to the N⁻well layer (base), namely the emitter formation region and the PN deviceseparation region. Then, after introduction of a P-type impurity such asB, BF₂, etc. through these openings according to the ion injectionmethod, the thermally oxidized film as the resist was removed.

Subsequently, a thermally oxidized film was formed on the N⁻ well layer(base), and the thermally oxidized film was applied with resistpatterning to form openings for formation of the N⁺ layer for basecontact. Then, after introduction of an N-type impurity such as As,etc., the thermally oxidized film as the resist was removed.

Then, the P-type and N-type impurities were activated, diffused byapplication of heat treatment to form the P⁺ layer and the N⁺ layerseparate from each other on the upper part of the N⁻ well layer (base).

As the next step, after growth of BPSG, etc. on the whole surface of thedevice region and the device region to a thickness of 0.6 to 1.0 μmaccording to the CVD method, annealing was applied to form an interlayerinsulation film.

Next, a thermally oxidized film was formed on the interlayer insulationfilm, and the thermally oxidized film was applied with resist patterningto form openings for collector contact hole. Subsequently, afterformation of the interlayer insulation film and the P⁻ well layerthrough the openings, etching was applied in two steps to form contactholes reaching the P⁺ buried layer surface, followed by removal of thethermally oxidized film as the resist. Next, within the collectorcontact holes, a first electrode region comprising an Al film was formedby use of DMAH and hydrogen while maintaining the substrate surfacetemperature at 270° C. The first electrode region was permitted to growuntil its surface became coplanar with the interlayer insulation filmsurface.

Next, a thermally oxidized film was formed on the surface of the deviceregion, and the thermally oxidized film was applied with patterning toform resist openings for formation of contact holes for base andemitter. Subsequently, through these openings, the interlayer insulationfilm was applied with etching to form base contact holes and emittercontact holes, respectively.

Then, within these base contact holes and emitter contact holes,respective electrode regions comprising Al film were formed according tothe Al-CVD method.

Next, according to the sputtering method, an Al film was formed with athickness of about 0.5 to 1.0 μm, and the Al film was applied withpatterning to form a desired V-PNP transistor having the respectiveelectrodes such as emitter electrode, base electrode, collectorelectrode, etc. and the wirings accompanied with these formed thereon.

In the V-PNP transistor thus prepared, reduction of the emittergrounding current amplification β could be ameliorated.

[Second Experimental Example]

A V-PNP transistor with the constitution shown in FIG. 4 was prepared.The preparation steps are the same as those in the first Example asdescribed above up to the steps before formation of the first electroderegion according to the Al-CVD method.

In the present Example, the first electrode region and the secondelectrode region were formed at the same time according to the Al-CVDmethod.

In the V-PNP transistor thus prepared reduction of the emitter groundingcurrent amplification β could be ameliorated, and further the β of theparasitic transistor could be reduced.

As described above, according to the present Example, the collectorseries resistance of the P⁻ well layer of the collector region can bereduced to great extent by the first electrode region for connecting thesurface electrode for collector and the P⁺ buried region of thecollector region, whereby reduction of the emitter grounding currentamplification β of the bipolar transistor can be ameliorated, and alsothe frequency characteristic can be improved.

Also, according to the present invention, in addition to the firstelectrode region as described above, by the second electrode regionconnecting the electrode for guard ring on the N⁻ epitaxial layer andthe N⁺ buried layer, the β of the parasitic transistor can be reduced,and also the leak current to the substrate can be reduced, even if themaximum potential may be biases without enlargement of the device size.Further, improvement of frequency characteristic can be effected,because the junction capacity of the collector region can be madesmaller.

(Third Embodiment)

Next, the electrode structure according to the present invention isdescribed by referring to an example in which it is applied to staticinduction transistor (SIT).

Referring now to drawings, an example of the present invention isdescribed. In FIG. 6, 101 is a semiconductor substrate, such as silicon,101' a source region, 102 a gate diffusion region, 103 a drain diffusionregion, 104 an insulation region such as silicon dioxide, 105 a metalwiring region formed by the sputtering method, etc., 106 an electroderegion comprising aluminum or aluminum-silicon deposited within theconcavity 110 by the selective aluminum CVD method.

FIGS. 7A to 7E are preparation steps of the SIT according to the presentExample.

First, on the substrate 401' which becomes the source region, a silicondioxide film 404 is grown to 4000 Å according to the thermal oxidationmethod on the silicon substrate 401 provided with an epitaxial layerwith high resistance. Next, at predetermined positions of the oxidizedfilm 404, holes are opened for the drain region of 1 μm square. Next, byway of ion injection, arsenic is implanted at 1×10¹⁶ ions/cm², to form adrain diffusion layer 403 (FIG. 7A).

Next, according to the lithographic steps, for example, a resist imagewith holes of about 0.8 μm in width being opened is formed according tothe lithographic steps. With that resist as the mask, the oxidized film404 was subjected to hole opening by dry etching by use of an etchant ofthe C₂ F₆ -CHF₃ system, and then a concavity 410 with a depth of, forexample, about 1.0 μm is formed by dry etching of the CC1₂ F₂ -N₂ systemon the substrate 401. Then, the resist used for the mask was removed,and a silicon dioxide film with a thickness of 1500 Å is permitted togrow on the side and the bottom surfaces of the concavity 410. At thistime, also the exposed portion of the drain surface is covered at thesame time with silicon dioxide, and then reactive ion etching with theC₂ F₆ -CHF₃ is effected to have only the bottom surface of the concavity410 exposed (FIG. 7B).

Next, by ion injection, boron trifluoride is implanted at a density of1×10¹⁵ ions/cm². Subsequently, ion activation is effected in a nitrogenatmosphere of about 1000° C., 10 minutes to form a gate diffusion layer402 (FIG. 7C).

Next, burying within the concavity of the aluminum-silicon which is thespecific feature of the present invention is practiced. For thesubstrate with the structure shown in FIG. 7C, the treatment for buryingthe aluminum-silicon is described in detail by referring to FIG. 8.

First, a substrate is arranged in the loadlock chamber 511. Into theloadlock chamber 511 is introduced hydrogen as described above to form ahydrogen atmosphere. And, the reaction chamber 512 is evacuatedinternally to ca. 1×10⁻⁸ Torr by the evacuation system 510.

However, an Al-Si film can be formed even if the vacuum degree withinthe reaction chamber 512 may be poorer than 1×10 Torr.

And, from the gasline not shown, dimethylaluminum hydride (DMAH) and Si₂H₆ are fed. For the carrier gas through the DMAH line, H₂ is employed.

The second gasline not shown in for H₂ as the reaction gas, and H₂ ispermitted to flow through the second gas line, and the opening of theslow leak value not shown was controlled to adjust the pressure withinthe reaction chamber 512 to a predetermined value. A typical pressure inthis case is made ca. 1.5 Torr. Through the DMAH line, DMLAH isintroduced into the reaction tube. The total pressure is ca. 1.5 Torr,and the DMAH partial pressure is made ca. 1.5×10⁻⁴ Torr, and the Si₂ H₆partial pressure 2×10⁻⁶ Torr. Then, the lamp is lighted to heat directlythe wafer. Thus, an Al-Si is deposited.

As the starting gas containing Si as the second starting gas duringformation of the Al-Si film, Si₂ H₆, SiH₄, Si₃ H₈, Si(CH₃)₄, SiC1₄, SiH₂C1₂, SiH₃ C1 can be employed.

By addition of DMAH, H₂ and Si starting gas such as Si₂ H₆, etc., anAl-Si containing 0.5 to 2.0% of Si can be deposited. The reaction tubepressure may be 0.05 to 760 Torr, desirably 0.1 to 0.8 Torr, thesubstrate temperature 260° C. to 440° C., the DMAH partial pressure1×10⁻⁵ -fold to 1.3×10⁻³ -fold of the pressure within the reaction tube,the Si₂ H₆ partial pressure in the range of 1×10⁻⁷ to 1×10⁻⁴ -fold ofthe pressure within the reaction tube, whereby an Al-Si can be thusdeposited.

After elapse of a predetermined deposition time, feeding of DMAH is oncestopped. The predetermined deposition time for the Al-Si film depositedin the process refers to the time before the Al-Si buries the concavity410 therein, which is about 20 minutes. The substrate of the substratetemperature by direct heating at this time is made 270° C. During thesteps up to this step, an Al-Si film 406 is deposited selectively onlyat the concavity portion 410 (see FIG. 7D).

Next, on the drain region 403, holes are opened according tolithographic steps, and an aluminum-silicon 405 is deposited to 8000 Åon the whole substrate surface by the DC sputtering method. Finally, dryetching according to the C1₂ BC1₃ -He system is applied to work thealuminum-silicon to a desired wiring shape (see FIG. 7E).

In the Example as described above, description is made about the case ofN channel SIT wherein the drain electrode 103 is n-type and the gateelectrode 102 is the p-type N channel SIT, but P-channel wherein thedrain electrode 103 is p-type and the gate electrode 102 is n-type canbe also similarly formed.

As described above, by use of the selective aluminum CVD method, aburied electrode region of the improved type SIT with a width of theconcavity of 0.8 μm or less can be formed with high reliability.

The film forming method preferable for the present invention is to forma deposited film by the surface reaction on an electron-donativesubstrate by use of a gas of an alkylaluminum hydride and hydrogen gas(hereinafter called the Al-VCD method).

Particularly, by use of monomethylaluminum hydride (MMAH) as thestarting gas or dimethylaluminum hydride (DMAH) as the starting gas, andH₂ gas as the reactive gas, and heating the substrate surface under themixture of these gases, an Al film of good quality can be deposited.Here, during the selective deposition of Al, it is preferable tomaintain the surface temperature at the decomposition temperature of thealkylaluminum hydride or higher and less than 450° C., more preferably260° C. to 440° C.

As the method for heating the substrate to the above-mentionedtemperature range, there are direct heating and indirect heating.Particularly, by maintaining the substrate at the above-mentionedtemperature by direct heating, an Al film of good quality can be formedat high deposition speed. For example, when the substrate surfacetemperature during Al film formation is made 260° C. to 440° C. which ismore preferable temperature range, a film of good quality can beobtained at higher deposition speed of 300 Å to 5000 Å/min. which ishigher than in the case of resistance heating. As such direct heatingmethod (substrate itself is heated by direct transmission of the energyfrom the heating means to the substrate), for example, lamp heating bymeans of halogen lamp, xenon lamp, etc. may be included. As the methodfor indirect heating, there is resistance heating, by which heating canbe performed by use of a heat-generating body, etc. provided at thesubstrate supporting member for supporting the substrate to formdeposited film arranged in the space for formation of the depositedfilm.

By applying the CVD method to the substrate having the electron-donativesurface portion and the non-electron donative surface portion co-presentthereon, a single crystal of Al is formed under good selectivity only onthe electron-donative substrate surface portion. The Al thus formed willhave all of excellent characteristics desirable for the electrode/wiring material. That is, reduction of generation probability ofhillock, reduction of generation probability of alloy spike will beaccomplished.

This may be considered to be due to the fact that substantially no orextremely small formation of alloy spike, etc. on account of theeutectic reaction with the subbing silicon, etc. is seen, because Al ofgood quality can be formed on the surface comprising a semiconductor oran electroconductive member as the electron-donative surface, and alsothe Al is excellent in crystallinity. And, when employed for theelectrode of a semiconductor device, an effect surpassing the concept ofthe Al electrode which has been contemplated in the prior art, and couldnot be even expected in the prior art can be obtained.

Having described above about the fact that the Al deposited on anelectron-donative surface, for example, within the opening wit_(b) thesemiconductor substrate surface exposed becomes to have a singlecrystalline structure, according to the Al-CVD method, a metal filmcomposed mainly of Al as described below can be also selectivelydeposited, and its film quantity also exhibits excellentcharacteristics.

For example, in addition to a gas of an alkylaluminum hydride andhydrogen,

a gas containing Si atoms such as SiH₄, Si₂ H₆, Si₃ H₈, Si(CH₃)₄, SiC1₄,SiH₂ C1₂, SiHC1₃, or the like,

a gas containing Ti atoms such as TiC1₄, TiBr₄, Ti(CH₃)₄, etc.,

a gas containing Cu atoms such as copper bisacetylacetonate Cu(C₅ H₇O₂), copper bisdipivaloylmethanite Cu(C₁₁ H₁₉ O₂)₂, copperbishexafluoroacetylacetonate Cu(C₅ HF₆ O₂)₂, etc.,

may be introduced in a preferable combination to forth a gas mixtureatmosphere, thereby forming an electrode by selective deposition of anelectroconductive material such as Al-Si, Ai-Ti, Al-Cu, Al-Si-Ti,Al-Si-Cu, etc.

The Al-CVD method as described above is a film forming method excellentin selectivity, and also the surface characteristic of the film formedhas good surface characteristic. Hence, by application of anon-selective film forming method to the next deposition step, Al or ametal film composed mainly of Al can be also formed on the. Al filmselectively deposited as described above and SiO₂, etc. as theinsulating film, whereby a preferable metal film having high useabilityfor general purpose as the wiring of semiconductor device can beobtained.

Specific examples of such metal film include the following. There may beincluded combinations of Al, Al-Si, Al-Ti, Al-Cu, Al-Si-Ti, Al-Si-Cu,etc. deposited selectively with Al, Al-Si, Al-Ti, Al-Cu, Al-Si-Ti,Al-Si-Cu, etc.

As the film forming method for non-selective deposition, there are otherCVD methods than the Al-CVD method as described above, the sputteringmethod, etc.

(Film forming Apparatus)

Next, a preferable film forming apparatus for forming the electrodeaccording to the present invention is described.

FIG. 9 to FIG. 11 show schematically a sequential metal film formingapparatus preferable for applying the film forming method as describedabove.

The sequential metal film forming apparatus, as shown in FIG. 9, isconstituted of loadlock chamber 311 connected mutually communicatedunder shielding from outer air through the gate valves 310a to 310f, aCVD reaction chamber 312 as the first film forming chamber, an Rfetching chamber ,313, a sputtering chamber 314 as the second filmforming chamber and a loadlock chamber 315, and the respective chambersare constituted reducible in pressure by evacuation with the evacuationsystems 316a to 316e. Here, the above loadlock chamber 311 is a chamberfor replacing the substrate atmosphere before deposition treatment withH₂ atmosphere after evacuation in order to improve the throughputcharacteristic. The next CVD reaction chamber 312 is a chamber forselective deposition on the substrate according to the Al-CVD method asdescribed above under normal pressure or reduced pressure, in which asubstrate holder 318 having a heat-generating member 317 which can heatthe substrate to be formed to a range of 200° C. to 450° C. is providedinternally, and starting gases such as alkylaluminum hydride bubbled andgasified in the bubbler 319-1 are introduced into the chamber throughthe starting gas introducing line 319 for CVD, and also hydrogen gas asthe reactive gas is introduced through the gasline 319'. The next Rfetching chamber 313 is a chamber for carrying out cleaning of thesubstrate surface after selective deposition (etching) under Aratmosphere, and internally thereof are provided at least a substrateholder 320 capable of heating the substrate to a range of 100° C. to250° C. and an electrode line for Rf etching 321, and also an Ar gasfeeding line 322 is connected. The next sputtering chamber 314 is achamber for depositing non-selectively a metal film by sputtering underAr atmosphere on the substrate surface, and internally thereof areprovided a substrate holder 323 heated within a range of 200° C. to 250°C. and a target electrode 324 for mounting a sputter target material324a, and also an Ar gas feeding line 325 is connected. The finalloadlock chamber 315 is a control chamber before taking out thesubstrate after completion of the metal film deposition into the outerair, and constituted so that the atmosphere may be replaced with N₂.

FIG. 10 shows another constitutional example of a sequential metal filmforming apparatus preferable for applying the film forming method asdescribed above, and the same portions as described above in FIG. 9 aremade the same symbols. The difference of the apparatus in FIG. 10 fromthat in FIG. 9 resides in that a halogen lamp 330 is provided as thedirect heating means and the substrate surface can be directly heated,and for that purpose, the substrate holder 312 is provided with a nail331 for holding the substrate under suspended state.

By heating directly the substrate surface with such constitution, thedeposition speed can be further improved as described above.

The sequential metal film forming apparatus with the above constitution,as shown in FIG. 11, is substantially equivalent to one with thestructure having the above loadlock chamber 311, the CVD reactionchamber 312, the Rf etching chamber 313, the sputtering chamber 314, theloadlock chamber 315 connected mutually to one another with theconveying chamber 326 as the relay chamber. With this constitution, theloadlock chamber 311 functions also as the loadlock chamber 315. In theabove conveying chamber 326, as shown in the Figure, an arm 327 as theconveying means reversibly rotatable in the AA direction and stretchablein the BB direction is provided, and with the arm 327, as shown in thearrowhead in FIG. 12, the substrate can be moved following the stepssuccessively from the loadlock chamber 311 to the CVD chamber 312, theRf etching chamber 313, the sputtering chamber 314, the loadlock chamber315 without exposure to outer air.

(Film Forming Procedure)

The film forming procedure for forming the electrode and wiringaccording to the present invention is described.

FIG. 13 is a schematic perspective view for illustration of the filmforming procedure for formation of the electrode and wiring according tothe present invention.

First, the outline is described. A semiconductor substrate havingopenings formed on an insulating film is prepared, which substrate isarranged in a film forming chamber, and its surface is maintained at,for example, 260° C. to 450° C. to deposit selectively Al at the portionwhere the semiconductor is exposed according to the hot CVD method in amixed atmosphere of DMAH as the alkylaluminum hydride and hydrogen gas.Of course, as described above, a metal film composed mainly of Al suchas Al-Si, etc. may be also deposited selectively by introducing a gascontaining Si atoms, etc. Next, on the Al selectively deposited by thesputtering method and the insulating film, Al or a metal film composedmainly of Al is non-selectively formed. Then, by pattering of the metalfilm non-selectively deposited to a desired wiring shape, electrodes andwirings can be formed.

Referring next to FIG. 10 and FIG. 13, description is made in moredetail. First, a substrate is prepared. As the substrate, for example, asingle crystalline Si wafer having an insulating film provided withopenings with respective apertures provided thereon is prepared.

FIG. 13A is a schematic view showing a part of the substrate. Here, 401is a single crystalline silicon substrate as a conductive substrate, 402a thermally oxidized silicon film as the insulating film (layer). 403and 404 are openings (exposed portions), having apertures different fromeach other. 410 is the groove bottom with Si exposed.

The procedure for forming Al film which becomes the electrode as thefirst wiring layer on the substrate is as follows with FIG. 10.

First, the substrate as described above is arranged in the loadlockchamber 311. Hydrogen is introduced into the loadlock chamber 311 tomake it under hydrogen atmosphere. And, the reaction chamber 312 isinternally evacuated to approximately 1×10⁻⁸ Torr by the evacuationsystem 316b. However, Al film can be formed even if the vacuum degreewithin the reaction chamber 312 may be worse than 1×10⁻⁸ Torr.

And, the gas of DMAH bubbled from the gasline 319 is fed. For thecarrier gas for the DMAH line, H₂ is employed.

The second gasline 319' is for H₂ as the reaction gas, and by flowing H2through the second gas line 319' and controlling the opening degree ofthe slow leak valve not shown to adjust the pressure within the reactionchamber 312 to a predetermined value. A typical pressure in this case ispreferably about 1.5 Torr. Through the DMAH line, DMAH is introducedinto the reaction tube. The total pressure is made about 1.5 Torr, andthe DMAH pressure 5.0×10³ Torr. Then, current, is passed to the halogenlamp 330 to heat directly the wafer. Thus, Al is selectively deposited.

After elapse of a predetermined deposition time, feeding of DMAH is oncestopped. The predetermined deposition time of the Al film deposited inthis process is the time until the thickness of the Al film on the Si(single crystalline silicon substrate 1) becomes equal to the filmthickness of the SiO₂ (thermally oxidized silicon film 2), and can bedetermined previously by experimentation.

The temperature of the substrate surface by direct heating at this timeis made about 270° C. According to the steps up to this state, the Alfilm 405 is selectively deposited within the openings and the grooves asshown in FIG. 13B.

All of the steps as described above are referred to as the first filmforming step for formation of electrode within contact hole.

After the above first film forming step, the CVD reaction chamber 312 isevacuated until reaching a vacuum degree of 5×10⁻³ Torr or lower by theevacuation system 316b. At the same time, the Rf etching chamber 313 isevacuated to 5×10⁻⁶ Torr or lower. After confirmation that the bothchambers have reached the above vacuum degree, the gate valve 310c isopened, the substrate moved from the CVD reaction chamber 312 to the Rfetching chamber 313 by the conveying means, and the gate valve 310cclosed. The substrate is conveyed to the Rf etching chamber 313, and theRf etching chamber 313 is evacuated by means of the evacuation system316c until reaching a vacuum degree of 10⁻⁶ Torr or lower. Then, argonis fed through the argon feeding line 322 for Rf etching, and the Rfetching chamber 313 maintained under an argon atmosphere of 10⁻¹ to 10⁻³Torr. The substrate holder 320 of Rf etching is maintained at about 200°C., Rf power of 100 W supplied to the electrode for Rf etching 321 forabout 60 seconds, and discharging of argon is caused to occur within theRf etching chamber 313 for about 60 seconds. By doing so, the surface ofthe substrate can be etched with argon ions to remove unnecessarysurface layer of the CVD deposited film. The etching depth in this caseis made about 100 Å in terms of the oxide. Here, surface etching of theCVD deposited film is effected in the Rf etching chamber, but since thesurface layer of the CVD film of the substrate conveyed through vacuumcontains no oxygen, etc., no Rf etching may be effected. In that case,the Rf etching chamber 313 function as the temperature changing chamberfor effecting temperature change within a short time, when thetemperatures in the CVD reaction chamber 12 and the sputtering chamber314 are greatly different.

In the RF etching chamber 313, after completion of Rf etching, flowingof argon is stopped, and the argon within the Rf etching chamber 313 isevacuated. After the Rf etching chamber 313 is evacuated to 5×10⁻⁶ Torrand the sputtering chamber 314 to 5×10⁻⁶ Torr or lower, the gate valve310d is opened. Then, the substrate is moved from the Rf etching chamber313 to the sputtering chamber 314 by means of a conveying means,followed by closing of the gate valve 310d.

After the substrate is conveyed to the sputtering chamber 314, thesputtering chamber 314 is made under an argon atmosphere of 10 to 10⁻³Torr similarly as in the Rf etching chamber 313, and the temperature ofthe substrate holder 323 for mounting the substrate set to about 200° to250° C. And discharging of argon is effected at a DC power of 5 to 10 kwto cut a target material such as Al or Al-Si (Si: 0.5%) and effect filmformation of a metal such as Al, Al-Si, etc. at a deposition speed ofabout 10000 Å/min. on the substrate. This step is a non-selectivedeposition step. This is called the second film forming step forformation of the wiring to be connected to the electrode.

After formation of a metal film of about 5000 Å, flowing of argon andapplication of DC power are stopped. After evacuation of the loadlockchamber 311 to 5×10⁻³ Torr or lower, the gate valve 310e is opened andthe substrate moved. After the gate valve 310e is closed, N₂ gas ispermitted to flow into the loadlock chamber 311 until reachingatmospheric pressure, the gate valve 310f opened and the substrate takenout of the apparatus.

According to the second Al film deposition step as described above, theAl film 406 can be formed on the SiO₂ film 402 as shown in FIG. 13C.

And, by patterning the Al film 406 as shown in FIG. 13D, a wiring with adesired shape can be obtained.

(Experimental Examples)

In the following, how excellent is the above-described Al-CVD method isand how good of the quality the Al film deposited within the openings isare described based on the experimental results.

First, as the substrate, a plurality of N-type single crystallinesilicon wafers were prepared, which are thermally oxidized on thesurface to form SiO₂ of 8000 Å, and have various openings with variousapertures from 0.25 μm c 0.25 μm square to 100 μm×100 μm squarepatterned to have the subbing Si single crystal exposed (Sample 1--1).

These are subjected to formation of Al films according to the Al-CVDmethod under the conditions as described below. Under the commonconditions by use of DMAH as the starting gas, and hydrogen as thereaction gas, a total pressure of 1.5 Torr, a DMAH partial pressure of5.0×10⁻³ Torr, the power amount passed through the halogen lamp isadjusted and the substrate surface temperature set within the range of200° C. to 490° C. to form films.

The results are shown in Table 1.

                                      TABLE 1                                     __________________________________________________________________________    Substrate surface                                                             temperature (°C.)                                                                  200230250260270280300350400440450460470480490                     __________________________________________________________________________     Deposition speed (Å/min)                                                              ##STR1##                                                          Line defect of Si                                                                         ##STR2##                                                          Carbon content                                                                            ##STR3##                                                          Resistance (μ Ωcm)                                                               ##STR4##                                                          Reflectance (%)                                                                           ##STR5##                                                          Hillock density of 1 μm or larger (cm.sup.-2)                                          ##STR6##                                                          Spike generation (%) (destruction probability of 0.15 μm                               ##STR7##                                                         __________________________________________________________________________

As can be seen from Table 1, at a substrate surface temperature bydirect heating of 260° C. or higher, Al is deposited selectively at ahigh deposition speed of 3000 to 5000 Å/min. within the openings.

When the characteristics of the Al film within the openings at substratesurface temperature range of 260° C. to 440° C. are examined, they arefound to be excellent such that no carbon is contained, with resistivitybeing 2.8 to 3.4 μΩcm, reflectance 90 to 95%, hillock density of 1 μm orhigher 0 to 10 and substantially no spike generation (destructionprobability of 0.15 μm junction).

In contrast, at substrate surface temperatures of 200° C. to 250° C.,the film is found to be considerably good as compared with the prior artalthough the film quality is slightly worse as compared with the case of260° C. to 440° C., but the deposition speed is 1000 to 1500 Å/min.,which can never be said to be sufficiently high.

When the substrate surface temperature becomes 450° C. or higher, thecharacteristics of the Al film with the openings are lowered with thereflectance becoming 60% or less, hillock density of 1 μm or more 10 to10⁴ cm⁻², alloy spike generation 0 to 30%

Next, description is made about how suitably the method as describedabove can be used openings such as contact hole or thru-hole.

That is, it can be also preferably applied to the contact hole/thru-holestructure comprising the material as described below.

On the sample 1--1 as described above, an Al film is formed on asubstrate (sample) as described below under the same conditions as whenthe Al film is formed.

On a single crystalline silicon as the first substrate surface materialis formed a silicon oxide film according to the CVD method as the secondsubstrate surface material, and patterning effected according to thephotolithographic steps to have the single crystalline silicon surfacepartially exposed.

The film thickness of the thermally oxidized SiO₂ film has a filmthickness of 8000 Å, the exposed portion of the single crystallinesilicon a size of 0.25 μm×0.25 μm to 100 μm×100 μm. Thus, sample 1-2 isprepared (hereinafter such samples are represented as "CVD SiO₂(hereinafter abbreviated as SiO₂ /single crystalline silicon")

Sample 1-3 is boron doped oxide film formed by normal pressure CVD(hereinafter abbreviated as BSG)/single crystalline silicon,

sample 1-4 phosphorus doped oxide film formed by normal pressure CVD(hereinafter abbreviated as PSG)/single crystalline silicon,

sample 1-5 phosphorus and boron doped oxide film formed by normalpressure CVD (hereinafter abbreviated as BSPG)/single crystallinesilicon,

sample 1-6 nitride film formed by plasma CVD (hereinafter abbreviates asP-SiN)/single crystalline silicon,

sample 1-7 hot nitride film (hereinafter abbreviated as T-SiN) /singlecrystalline silicon,

sample 1-8 nitride film formed by low pressure CVD (hereinafterabbreviated as LP-SiN)/single crystalline silicon,

sample 1-9 nitride film formed by means of an ECR apparatus (hereinafterabbreviated as ECR-SiN)/ single crystalline silicon.

Further, according to all combinations of the first substrate surfacematerials (18 kinds) and the second substrate surface materials (9kinds), samples 1-11 to 1-179 (note: sample Nos. 1-10, 20, 30, 40, 50,60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170 are lacking) areprepared. As the first substrate surface material, single crystallinesilicon (single crystalline Si), polycrystalline silicon(polycrystalline Si), amorphous silicon (amorphous Si), tungsten (W),molybdenum (Mo), tantalum (Ta), tungsten silicide (WSi), titaniumsilicide (TiSi), aluminum (Al), aluminum silicon (Al-si), titaniumaluminum (Al-Ti), titanium nitride (Ti-N), copper (Cu), aluminum siliconcopper (Al-Si-Cu), aluminum palladium (Al-Pd), titanium. (Ti),molybdenum silicide (Mo-Si), tantalum silicide (Ta-Si) are employed. Asthe second substrate surface material, T-SiO₂, SiO₂, BSG, PSG, BPSG,P-SiN, T-SiN, LP-SiN, ECR-SiN are employed. For all of the samples asdescribed above, good Al films comparable with the sample 1--1 could beformed.

Next, on the substrate having Al deposited selectively as describedabove, Al is deposited non-selectively according to the sputteringmethod as described above, followed by patterning.

As the result, the Al film formed according to the sputtering method,and the Al film selectively selected within the openings are found to beunder the contact state with both electrically and mechanically highdurability due to good surface characteristic of the Al film.

We claim:
 1. A method for producing a semiconductor device including abipolar transistor, comprising the steps of:forming a firstsemiconductor region of a first conductivity type; forming a secondsemiconductor region of the first conductivity type on the first regionso that the first and second regions form a collector region, the secondregion having a higher resistivity than that of the first region;forming a third semiconductor region of a second conductivity type, fordefining a base region, on the second region; forming a fourth region ofa first conductivity type semiconductor, for defining an emitter region,on the third region; forming a groove in the second region so as toexpose a surface portion of the first region; forming contact holes inthe third and fourth regions, the contact holes having depths smallerthan a depth of the groove; forming collector, base and emitterelectrodes in the groove and in the contact holes in the third andfourth regions, respectively, by means of a selective deposition processhaving a first process step in which only the groove is filled with ametal material, and a separate and subsequent step in which the contactholes are filled with a metal material.
 2. A method according to claim1, wherein the metal material is alkylaluminumhydride.
 3. A methodaccording to claim 1, wherein the base and emitter electrodes are formedin a first chamber, and a wiring connected to the base and the emitterelectrodes is formed in a second chamber.